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Low-Pressure Metalorganic Vapor Phase Epitaxy of Inp on (111) Substrates

Y. Ababou, Rémo A. Masut and Arthur Yelon

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29925/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 2)
Publisher: American Vacuum Society
DOI: 10.1116/1.581101
Official URL: https://doi.org/10.1116/1.581101
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:19
Cite in APA 7: Ababou, Y., Masut, R. A., & Yelon, A. (1998). Low-Pressure Metalorganic Vapor Phase Epitaxy of Inp on (111) Substrates. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(2), 790-793. https://doi.org/10.1116/1.581101

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