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Nonevaporable getter films for ultrahigh vacuum applications

C. Benvenuti, P. Chiggiato, Fabio Cicoira and Y. L'Aminot

Article (1998)

Document published while its authors were not affiliated with Polytechnique Montréal

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PolyPublie URL: https://publications.polymtl.ca/29848/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 1)
Publisher: American Vacuum Society
DOI: 10.1116/1.580963
Official URL: https://doi.org/10.1116/1.580963
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Benvenuti, C., Chiggiato, P., Cicoira, F., & L'Aminot, Y. (1998). Nonevaporable getter films for ultrahigh vacuum applications. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(1), 148-154. https://doi.org/10.1116/1.580963

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