C. Benvenuti, P. Chiggiato, Fabio Cicoira
and V. Ruzinov
Paper (1997)
Document published while its authors were not affiliated with Polytechnique Montréal
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| PolyPublie URL: | https://publications.polymtl.ca/29847/ |
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| Conference Title: | 6th International Workshop on Electronic Properties of Metal/Non-Metal Microsystems (EPMS 97) |
| Conference Date(s): | 1997-09-07 - 1997-09-12 |
| Journal Title: | Vacuum (vol. 50, no. 1-2) |
| Publisher: | Elsevier |
| DOI: | 10.1016/s0042-207x(98)00017-7 |
| Official URL: | https://doi.org/10.1016/s0042-207x%2898%2900017-7 |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 25 Sep 2024 16:11 |
| Cite in APA 7: | Benvenuti, C., Chiggiato, P., Cicoira, F., & Ruzinov, V. (1997, September). Decreasing surface outgassing by thin film getter coatings [Paper]. 6th International Workshop on Electronic Properties of Metal/Non-Metal Microsystems (EPMS 97). Published in Vacuum, 50(1-2). https://doi.org/10.1016/s0042-207x%2898%2900017-7 |
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