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Structure of the Interfacial Region Between Polycarbonate and Plasma-Deposited SiN₁.₃ And SiO₂ Optical Coatings Studied by Ellipsometry

A. Bergeron, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/29844/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 6)
Publisher: American Vacuum Society
DOI: 10.1116/1.581527
Official URL: https://doi.org/10.1116/1.581527
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Bergeron, A., Sapieha, J.-E., & Martinu, L. (1998). Structure of the Interfacial Region Between Polycarbonate and Plasma-Deposited SiN₁.₃ And SiO₂ Optical Coatings Studied by Ellipsometry. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(6), 3227-3234. https://doi.org/10.1116/1.581527

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