Structure of the Interfacial Region Between Polycarbonate and Plasma-Deposited SiN₁.₃ And SiO₂ Optical Coatings Studied by Ellipsometry

A. Bergeron, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (1998)

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Additional Information:	Nom historique du département: Département de génie physique et de génie des matériaux
Department:	Department of Engineering Physics
Research Center:	GCM - Thin Film Physics and Technology Research Group
PolyPublie URL:	https://publications.polymtl.ca/29844/
Journal Title:	Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 6)
Publisher:	American Vacuum Society
DOI:	10.1116/1.581527
Official URL:	https://doi.org/10.1116/1.581527
Date Deposited:	18 Apr 2023 15:22
Last Modified:	25 Sep 2024 16:11

Cite in APA 7:	Bergeron, A., Sapieha, J.-E., & Martinu, L. (1998). Structure of the Interfacial Region Between Polycarbonate and Plasma-Deposited SiN₁.₃ And SiO₂ Optical Coatings Studied by Ellipsometry. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(6), 3227-3234. https://doi.org/10.1116/1.581527
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