Sobrinho A. S. Da Silva, M. Latrèche, G. Czeremuszkin, Jolanta-Ewa Sapieha
and Michael R. Wertheimer
Article (1998)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/29749/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 6) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.581519 |
| Official URL: | https://doi.org/10.1116/1.581519 |
| Date Deposited: | 18 Apr 2023 15:23 |
| Last Modified: | 25 Sep 2024 16:11 |
| Cite in APA 7: | Da Silva, S. A. S., Latrèche, M., Czeremuszkin, G., Sapieha, J.-E., & Wertheimer, M. R. (1998). Transparent barrier coatings on polyethylene terephthalate by single- and dual-frequency plasma-enhanced chemical vapor deposition. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(6), 3190-3198. https://doi.org/10.1116/1.581519 |
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