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Transparent barrier coatings on polyethylene terephthalate by single- and dual-frequency plasma-enhanced chemical vapor deposition

Sobrinho A. S. Da Silva, M. Latreche, G. Czeremuszkin, Jolanta-Ewa Sapieha and Michael R. Wertheimer

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29749/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 6)
Publisher: American Vacuum Society
DOI: 10.1116/1.581519
Official URL: https://doi.org/10.1116/1.581519
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Da Silva, S. A. S., Latreche, M., Czeremuszkin, G., Sapieha, J.-E., & Wertheimer, M. R. (1998). Transparent barrier coatings on polyethylene terephthalate by single- and dual-frequency plasma-enhanced chemical vapor deposition. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(6), 3190-3198. https://doi.org/10.1116/1.581519

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