A. C. Fozza, A. Kruse, A. Holländer, A. Ricard and Michael R. Wertheimer
Article (1998)
An external link is available for this itemAdditional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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Department: | Department of Engineering Physics |
PolyPublie URL: | https://publications.polymtl.ca/29686/ |
Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 1) |
Publisher: | American Vacuum Society |
DOI: | 10.1116/1.581014 |
Official URL: | https://doi.org/10.1116/1.581014 |
Date Deposited: | 18 Apr 2023 15:23 |
Last Modified: | 25 Sep 2024 16:11 |
Cite in APA 7: | Fozza, A. C., Kruse, A., Holländer, A., Ricard, A., & Wertheimer, M. R. (1998). Vacuum Ultraviolet to Visible Emission of Some Pure Gases and Their Mixtures Used for Plasma Processing. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(1), 72-77. https://doi.org/10.1116/1.581014 |
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