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Vacuum Ultraviolet to Visible Emission of Some Pure Gases and Their Mixtures Used for Plasma Processing

A. C. Fozza, A. Kruse, A. Holländer, A. Ricard and Michael R. Wertheimer

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29686/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 1)
Publisher: American Vacuum Society
DOI: 10.1116/1.581014
Official URL: https://doi.org/10.1116/1.581014
Date Deposited: 18 Apr 2023 15:23
Last Modified: 08 Apr 2024 17:07
Cite in APA 7: Fozza, A. C., Kruse, A., Holländer, A., Ricard, A., & Wertheimer, M. R. (1998). Vacuum Ultraviolet to Visible Emission of Some Pure Gases and Their Mixtures Used for Plasma Processing. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(1), 72-77. https://doi.org/10.1116/1.581014

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