A. C. Fozza, A. Kruse, A. Holländer, A. Ricard and Michael R. Wertheimer
Article (1998)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| PolyPublie URL: | https://publications.polymtl.ca/29686/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 1) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.581014 |
| Official URL: | https://doi.org/10.1116/1.581014 |
| Date Deposited: | 18 Apr 2023 15:23 |
| Last Modified: | 08 Apr 2025 02:20 |
| Cite in APA 7: | Fozza, A. C., Kruse, A., Holländer, A., Ricard, A., & Wertheimer, M. R. (1998). Vacuum Ultraviolet to Visible Emission of Some Pure Gases and Their Mixtures Used for Plasma Processing. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(1), 72-77. https://doi.org/10.1116/1.581014 |
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