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Low-pressure organometallic vapor phase epitaxy of coherent InGaAsP/InP and InGaAsP/InAsP multilayers on InP(001)

S. Guillon, R. Y.-F. Yip, Patrick Desjardins, M. Chicoine, Z. Bougrioua, M. Beaudoin, A. Aït-Ouali and Rémo A. Masut

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29636/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 2)
Publisher: American Vacuum Society
DOI: 10.1116/1.581521
Official URL: https://doi.org/10.1116/1.581521
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Guillon, S., Yip, R. Y.-F., Desjardins, P., Chicoine, M., Bougrioua, Z., Beaudoin, M., Aït-Ouali, A., & Masut, R. A. (1998). Low-pressure organometallic vapor phase epitaxy of coherent InGaAsP/InP and InGaAsP/InAsP multilayers on InP(001). Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(2), 781-785. https://doi.org/10.1116/1.581521

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