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Release-Control Structures for Cantilever-Based Sensors

Behrouz Nikpour, Sasan Naseh, Leslie M. Landsberger, Mojtaba Kahrizi, Makarand Paranjape, Robert Antaki and John F. Currie

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29462/
Journal Title: Sensors and Materials (vol. 10, no. 5)
Official URL: https://sensors.myu-group.co.jp/article.php?ss=103...
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Nikpour, B., Naseh, S., Landsberger, L. M., Kahrizi, M., Paranjape, M., Antaki, R., & Currie, J. F. (1998). Release-Control Structures for Cantilever-Based Sensors. Sensors and Materials, 10(5), 287-296. https://sensors.myu-group.co.jp/article.php?ss=10332

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