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Diamond Nucleation Enhancement by Pretreating the Silicon Substrate With a Fluorocarbon Plasma

S. Schelz, Ludvik Martinu and M. Moisan

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29335/
Journal Title: Diamond and Related Materials (vol. 7, no. 9)
Publisher: Elsevier
DOI: 10.1016/s0925-9635(98)00191-5
Official URL: https://doi.org/10.1016/s0925-9635%2898%2900191-5
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: Schelz, S., Martinu, L., & Moisan, M. (1998). Diamond Nucleation Enhancement by Pretreating the Silicon Substrate With a Fluorocarbon Plasma. Diamond and Related Materials, 7(9), 1291-1302. https://doi.org/10.1016/s0925-9635%2898%2900191-5

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