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Spectroellipsometric Characterization of Plasma-Deposited Au Fluoropolymer Nanocomposite Films

Dan Dalacu and Ludvik Martinu

Article (1999)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/29010/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 17, no. 3)
Publisher: American Vacuum Society
DOI: 10.1116/1.581659
Official URL: https://doi.org/10.1116/1.581659
Date Deposited: 18 Apr 2023 15:22
Last Modified: 25 Sep 2024 16:10
Cite in APA 7: Dalacu, D., & Martinu, L. (1999). Spectroellipsometric Characterization of Plasma-Deposited Au Fluoropolymer Nanocomposite Films. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 17(3), 877-883. https://doi.org/10.1116/1.581659

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