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Excimer Laser Induced Removal of Particles From Hydrophilic Silicon Surfaces

X. Wu, Edward Sacher and Michel Meunier

Article (1999)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/28482/
Journal Title: Journal of Adhesion (vol. 70, no. 1-2)
Publisher: Taylor & Francis
DOI: 10.1080/00218469908010493
Official URL: https://doi.org/10.1080/00218469908010493
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:16
Cite in APA 7: Wu, X., Sacher, E., & Meunier, M. (1999). Excimer Laser Induced Removal of Particles From Hydrophilic Silicon Surfaces. Journal of Adhesion, 70(1-2), 167-178. https://doi.org/10.1080/00218469908010493

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