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Ion bombardment characteristics during the growth of optical films using a cold cathode ion source

O. Zabeida, Jolanta-Ewa Sapieha, Ludvik Martinu and D. E. Morton

Paper (1999)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/28464/
Conference Title: Annual Technical Conference of the Society of Vacuum Coaters
Official URL: https://www.svc.org/clientuploads/directory/resour...
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:16
Cite in APA 7: Zabeida, O., Sapieha, J.-E., Martinu, L., & Morton, D. E. Ion bombardment characteristics during the growth of optical films using a cold cathode ion source [Paper]. Annual Technical Conference of the Society of Vacuum Coaters. https://www.svc.org/clientuploads/directory/resource_library/99_267.pdf

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