Article (1999)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| PolyPublie URL: | https://publications.polymtl.ca/28463/ |
| Journal Title: | Journal of Applied Physics (vol. 85, no. 9) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.370139 |
| Official URL: | https://doi.org/10.1063/1.370139 |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 08 Apr 2025 02:18 |
| Cite in APA 7: | Zabeida, O., & Martinu, L. (1999). Ion Energy Distributions in Pulsed Large Area Microwave Plasma. Journal of Applied Physics, 85(9), 6366-6372. https://doi.org/10.1063/1.370139 |
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