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Ion Energy Distributions in Pulsed Large Area Microwave Plasma

O. Zabeida and Ludvik Martinu

Article (1999)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/28463/
Journal Title: Journal of Applied Physics (vol. 85, no. 9)
Publisher: American Institute of Physics
DOI: 10.1063/1.370139
Official URL: https://doi.org/10.1063/1.370139
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:16
Cite in APA 7: Zabeida, O., & Martinu, L. (1999). Ion Energy Distributions in Pulsed Large Area Microwave Plasma. Journal of Applied Physics, 85(9), 6366-6372. https://doi.org/10.1063/1.370139

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