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Production of photoluminescent Si-based nanostructures by laser ablation : effects of the ablation and post-deposition conditions

Andrei V. Kabashin, M. Charbonneau-Lefort, Michel Meunier and Richard Leonelli

Paper (2000)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/28094/
Conference Title: 5th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 2000)
Conference Location: San Jose, CA, United States
Conference Date(s): 2000-01-24 - 2000-01-26
Publisher: SPIE - International Society for Optical Engineering
DOI: 10.1117/12.387555
Official URL: https://doi.org/10.1117/12.387555
Date Deposited: 18 Apr 2023 15:22
Last Modified: 25 Sep 2024 16:09
Cite in APA 7: Kabashin, A. V., Charbonneau-Lefort, M., Meunier, M., & Leonelli, R. (2000, January). Production of photoluminescent Si-based nanostructures by laser ablation : effects of the ablation and post-deposition conditions [Paper]. 5th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 2000), San Jose, CA, United States. https://doi.org/10.1117/12.387555

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