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Plasma Deposition of Optical Films and Coatings: a Review

Ludvik Martinu and D. Poltras

Article (2000)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/28001/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 18, no. 6)
Publisher: American Vacuum Society
DOI: 10.1116/1.1314395
Official URL: https://doi.org/10.1116/1.1314395
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:15
Cite in APA 7: Martinu, L., & Poltras, D. (2000). Plasma Deposition of Optical Films and Coatings: a Review. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 18(6), 2619-2645. https://doi.org/10.1116/1.1314395

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