Ludvik Martinu
and Daniel Poitras
Article (2000)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/28001/ |
| Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 18, no. 6) |
| Publisher: | American Vacuum Society |
| DOI: | 10.1116/1.1314395 |
| Official URL: | https://doi.org/10.1116/1.1314395 |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 25 Sep 2024 16:09 |
| Cite in APA 7: | Martinu, L., & Poitras, D. (2000). Plasma Deposition of Optical Films and Coatings: a Review. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 18(6), 2619-2645. https://doi.org/10.1116/1.1314395 |
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