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Growth and Structure of Hyperthin SiO₂ Coatings on Polymers

G. Dennler, A. Houdayer, Y. Ségui and Michael R. Wertheimer

Article (2001)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/27460/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 19, no. 5)
Publisher: American Vacuum Society
DOI: 10.1116/1.1385911
Official URL: https://doi.org/10.1116/1.1385911
Date Deposited: 18 Apr 2023 15:21
Last Modified: 22 May 2024 13:52
Cite in APA 7: Dennler, G., Houdayer, A., Ségui, Y., & Wertheimer, M. R. (2001). Growth and Structure of Hyperthin SiO₂ Coatings on Polymers. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 19(5), 2320-2327. https://doi.org/10.1116/1.1385911

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