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Structural studies of hyper-thin SiO₂ and Si₃N₄ coatings on polymers

Gilles Dennler, Michael R. Wertheimer, A. Houdayer and Y. Ségui

Paper (2001)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/27459/
Conference Title: 44th Annual Technical Conference
Conference Location: Philadelphia, PA, United States
Conference Date(s): 2001-04-21 - 2001-04-26
Publisher: Society of Vacuum Coaters
Official URL: https://www.svc.org/index.php?src=directory&view=r...
Date Deposited: 18 Apr 2023 15:21
Last Modified: 30 Apr 2025 16:17
Cite in APA 7: Dennler, G., Wertheimer, M. R., Houdayer, A., & Ségui, Y. (2001, April). Structural studies of hyper-thin SiO₂ and Si₃N₄ coatings on polymers [Paper]. 44th Annual Technical Conference, Philadelphia, PA, United States. https://www.svc.org/index.php?src=directory&view=resource_library&submenu=DigitalLibrary&srctype=detail&back=resource_library&refno=6456

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