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Focusing Method and Apparatus for High-Resolution Projection Patterning

D. Popovici and Michel Meunier

Article (2001)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/27120/
Journal Title: Review of Scientific Instruments (vol. 72, no. 2)
Publisher: American Institute of Physics
DOI: 10.1063/1.1340019
Official URL: https://doi.org/10.1063/1.1340019
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:14
Cite in APA 7: Popovici, D., & Meunier, M. (2001). Focusing Method and Apparatus for High-Resolution Projection Patterning. Review of Scientific Instruments, 72(2), 1435-1437. https://doi.org/10.1063/1.1340019

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