In situ ellipsometric study of the initial growth stages of a TiO₂ by PECVD

Paper (2002)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/26897/
Conference Title:	45th Annual Technical Conference of the Society of Vacuum Coaters
Conference Location:	Lake Buena Vista, FL, USA
Conference Date(s):	2002-04-01 - 2002-04-30
Official URL:	https://www.svc.org/DigitalLibrary/document.cfm/15...
Date Deposited:	18 Apr 2023 15:20
Last Modified:	18 Apr 2023 15:20

Cite in APA 7:	Amassian, A., Larouche, S., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2002, April). In situ ellipsometric study of the initial growth stages of a TiO₂ by PECVD [Paper]. 45th Annual Technical Conference of the Society of Vacuum Coaters, Lake Buena Vista, FL, USA. https://www.svc.org/DigitalLibrary/document.cfm/1516/iIn-Situi-Ellipsometric-Study-of-the-Initial-Growth-Stages-of-a-TiOSub2Sub-by-PECVD

Cite in APA 7:

Amassian, A., Larouche, S., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2002, April). In situ ellipsometric study of the initial growth stages of a TiO₂ by PECVD [Paper]. 45th Annual Technical Conference of the Society of Vacuum Coaters, Lake Buena Vista, FL, USA. https://www.svc.org/DigitalLibrary/document.cfm/1516/iIn-Situi-Ellipsometric-Study-of-the-Initial-Growth-Stages-of-a-TiOSub2Sub-by-PECVD

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