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In situ ellipsometric study of the initial growth stages of a TiO₂ by PECVD

A. Amassian, S. Larouche, Jolanta-Ewa Sapieha, Patrick Desjardins and Ludvik Martinu

Paper (2002)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/26897/
Conference Title: 45th Annual Technical Conference of the Society of Vacuum Coaters
Conference Location: Lake Buena Vista, FL, USA
Conference Date(s): 2002-04-01 - 2002-04-30
Official URL: https://www.svc.org/clientuploads/directory/resour...
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:14
Cite in APA 7: Amassian, A., Larouche, S., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2002, April). In situ ellipsometric study of the initial growth stages of a TiO₂ by PECVD [Paper]. 45th Annual Technical Conference of the Society of Vacuum Coaters, Lake Buena Vista, FL, USA. https://www.svc.org/clientuploads/directory/resource_library/02_250.pdf

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