A. Amassian, S. Larouche, Jolanta-Ewa Sapieha, Patrick Desjardins
and Ludvik Martinu
Paper (2002)
An external link is available for this itemDepartment: | Department of Engineering Physics |
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PolyPublie URL: | https://publications.polymtl.ca/26897/ |
Conference Title: | 45th Annual Technical Conference of the Society of Vacuum Coaters |
Conference Location: | Lake Buena Vista, FL, USA |
Conference Date(s): | 2002-04-01 - 2002-04-30 |
Official URL: | https://www.svc.org/DigitalLibrary/document.cfm/15... |
Date Deposited: | 18 Apr 2023 15:20 |
Last Modified: | 18 Apr 2023 15:20 |
Cite in APA 7: | Amassian, A., Larouche, S., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2002, April). In situ ellipsometric study of the initial growth stages of a TiO₂ by PECVD [Paper]. 45th Annual Technical Conference of the Society of Vacuum Coaters, Lake Buena Vista, FL, USA. https://www.svc.org/DigitalLibrary/document.cfm/1516/iIn-Situi-Ellipsometric-Study-of-the-Initial-Growth-Stages-of-a-TiOSub2Sub-by-PECVD |
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