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Fabrication of Photoluminescent Si-Based Layers by Air Optical Breakdown Near the Silicon Surface

A. V. Kabashin and Michel Meunier

Paper (2002)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/26545/
Conference Title: European Materials Research Society 2001-Symposium L "Photon-Induced Surface Processing"
Conference Location: Strasbourg, France
Conference Date(s): 2001-06-05
Journal Title: Applied Surface Science (vol. 186, no. 1-4)
Publisher: Elsevier
DOI: 10.1016/s0169-4332(01)00690-0
Official URL: https://doi.org/10.1016/s0169-4332%2801%2900690-0
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 May 2023 15:32
Cite in APA 7: Kabashin, A. V., & Meunier, M. (2001, June). Fabrication of Photoluminescent Si-Based Layers by Air Optical Breakdown Near the Silicon Surface [Paper]. European Materials Research Society 2001-Symposium L "Photon-Induced Surface Processing", Strasbourg, France. Published in Applied Surface Science, 186(1-4). https://doi.org/10.1016/s0169-4332%2801%2900690-0

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