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Plasma-poymerized fluoropolymer thin films for microelectronic applications

M. S. Silverstein, R. Chen, Edward Sacher and L. Sandrin

Book Section (2002)

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Additional Information: Metallization of polymers 2. Montréal workshop on Polymer metallization held in Montréal in June 2001.
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/26285/
Conference Date(s): 2001-06-27 - 2001-06-29
Editors: Edward Sacher
Publisher: Springer
DOI: 10.1007/978-1-4615-0563-1_7
Official URL: https://doi.org/10.1007/978-1-4615-0563-1_7
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:13
Cite in APA 7: Silverstein, M. S., Chen, R., Sacher, E., & Sandrin, L. (2002). Plasma-poymerized fluoropolymer thin films for microelectronic applications. In Sacher, E. (ed.), Metallization of polymers 2 (61-71). https://doi.org/10.1007/978-1-4615-0563-1_7

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