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The Surface Modification of Dow Cyclotene by Low Energy N₂⁺ Beams and Its Effect on the Adhesion of Evaporated Cu Films

D. Q. Yang and Edward Sacher

Article (2002)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/26184/
Journal Title: Applied Surface Science (vol. 195, no. 1-4)
Publisher: Elsevier
DOI: 10.1016/s0169-4332(02)00540-8
Official URL: https://doi.org/10.1016/s0169-4332%2802%2900540-8
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:13
Cite in APA 7: Yang, D. Q., & Sacher, E. (2002). The Surface Modification of Dow Cyclotene by Low Energy N₂⁺ Beams and Its Effect on the Adhesion of Evaporated Cu Films. Applied Surface Science, 195(1-4), 202-213. https://doi.org/10.1016/s0169-4332%2802%2900540-8

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