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Plasma enhanced chemical vapor deposition of transparent barrier coatings

G. Czeremuszkin, M. Latrèche and Michael R. Wertheimer

Paper (2003)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25983/
Conference Title: 46th annual tech. conf. society of vacuum coaters (SVC)
Conference Location: San Francisco
Conference Date(s): 2003-01-01 - 2003-12-31
Official URL: https://www.svc.org/clientuploads/directory/resour...
Date Deposited: 18 Apr 2023 15:19
Last Modified: 25 Sep 2024 16:06
Cite in APA 7: Czeremuszkin, G., Latrèche, M., & Wertheimer, M. R. (2003, January). Plasma enhanced chemical vapor deposition of transparent barrier coatings [Paper]. 46th annual tech. conf. society of vacuum coaters (SVC), San Francisco. https://www.svc.org/clientuploads/directory/resource_library/03_0586.pdf

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