P. Hoffmann, I. Utke and Fabio Cicoira
Paper (2002)
Document published while its authors were not affiliated with Polytechnique Montréal
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| PolyPublie URL: | https://publications.polymtl.ca/25854/ |
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| Conference Title: | 10th International Symposium on Nanostructures: Physics and Technology |
| Conference Location: | USA |
| Conference Date(s): | 2002-06-17 - 2002-06-21 |
| Publisher: | SPIE |
| DOI: | 10.1117/12.510421 |
| Official URL: | https://doi.org/10.1117/12.510421 |
| Date Deposited: | 18 Apr 2023 15:20 |
| Last Modified: | 25 Sep 2024 16:06 |
| Cite in APA 7: | Hoffmann, P., Utke, I., & Cicoira, F. (2002, June). Limits of 3-D nanostructures fabricated by focused electron beam (FEB) induced deposition [Paper]. 10th International Symposium on Nanostructures: Physics and Technology, USA. https://doi.org/10.1117/12.510421 |
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