Relationship between the mechanical properties and the microstructure of nanocomposite TiN/SiN₁.₃ Coatings prepared by low temperature plasma enhanced chemical vapor deposition

P. Jedrzejowski, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2003)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/25837/
Journal Title:	Thin Solid Films (vol. 426, no. 1-2)
Publisher:	Elsevier
DOI:	10.1016/s0040-6090(03)00028-2
Official URL:	https://doi.org/10.1016/s0040-6090%2803%2900028-2
Date Deposited:	18 Apr 2023 15:20
Last Modified:	25 Sep 2024 16:06

Cite in APA 7:	Jedrzejowski, P., Sapieha, J.-E., & Martinu, L. (2003). Relationship between the mechanical properties and the microstructure of nanocomposite TiN/SiN₁.₃ Coatings prepared by low temperature plasma enhanced chemical vapor deposition. Thin Solid Films, 426(1-2), 150-159. https://doi.org/10.1016/s0040-6090%2803%2900028-2
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