<  Back to the Polytechnique Montréal portal

Relationship between the mechanical properties and the microstructure of nanocomposite TiN/SiN₁.₃ Coatings prepared by low temperature plasma enhanced chemical vapor deposition

P. Jedrzejowski, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2003)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25837/
Journal Title: Thin Solid Films (vol. 426, no. 1-2)
Publisher: Elsevier
DOI: 10.1016/s0040-6090(03)00028-2
Official URL: https://doi.org/10.1016/s0040-6090%2803%2900028-2
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:12
Cite in APA 7: Jedrzejowski, P., Sapieha, J.-E., & Martinu, L. (2003). Relationship between the mechanical properties and the microstructure of nanocomposite TiN/SiN₁.₃ Coatings prepared by low temperature plasma enhanced chemical vapor deposition. Thin Solid Films, 426(1-2), 150-159. https://doi.org/10.1016/s0040-6090%2803%2900028-2

Statistics

Dimensions

Repository Staff Only

View Item View Item