Article (2003)
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| Additional Information: | Vol. 2003, Erekutoronikusu |
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| Department: | Department of Engineering Physics |
| PolyPublie URL: | https://publications.polymtl.ca/25676/ |
| Journal Title: | Denshi Joho Tsushin Gakkai Taikai Koen Ronbunshu |
| Official URL: | https://www.ieice.org/publications/search/summary.... |
| Date Deposited: | 18 Apr 2023 15:20 |
| Last Modified: | 25 Sep 2024 16:05 |
| Cite in APA 7: | Martinu, L. (2003). Plasma processing of thin films for optics and photonics. Denshi Joho Tsushin Gakkai Taikai Koen Ronbunshu, S.48-S.49-S.48-S.49. https://www.ieice.org/publications/search/summary.php?id=CONF0000044997%26tbl=conf%26lang=en |
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