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Plasma processing of thin films for optics and photonics

Ludvik Martinu

Article (2003)

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Additional Information: Vol. 2003, Erekutoronikusu
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25676/
Journal Title: Denshi Joho Tsushin Gakkai Taikai Koen Ronbunshu
Official URL: https://www.ieice.org/publications/search/summary....
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:12
Cite in APA 7: Martinu, L. (2003). Plasma processing of thin films for optics and photonics. Denshi Joho Tsushin Gakkai Taikai Koen Ronbunshu, S.48-S.49-S.48-S.49. https://www.ieice.org/publications/search/summary.php?id=CONF0000044997%26tbl=conf%26lang=en

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