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Laser tuning silicon microdevices for analogue microelectronics

Michel Meunier, M. Cadotte and M. Ducharme

Paper (2002)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25652/
Conference Title: 3rd International Symposium on Laser Precision Microfabrication (LPM 2002)
Conference Location: Osaka, Japon
Conference Date(s): 2002-05-27 - 2002-05-31
Journal Title: RIKEN Review (no. 50)
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:12
Cite in APA 7: Meunier, M., Cadotte, M., & Ducharme, M. (2002, May). Laser tuning silicon microdevices for analogue microelectronics [Paper]. 3rd International Symposium on Laser Precision Microfabrication (LPM 2002), Osaka, Japon. Published in RIKEN Review, (50).

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