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Modeling electrical characteristics of laser tuned silicon microdevices

Michel Meunier, Mathieu Ducharme and Jean-Sebastien Bernier

Paper (2003)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25651/
Conference Title: Photon Processing in Microelectronics and Photonics II
Conference Location: San Jose, Calif.
Conference Date(s): 2003-01-27 - 2003-01-30
Publisher: International Society for Optical Engineering
DOI: 10.1117/12.479412
Official URL: https://doi.org/10.1117/12.479412
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:12
Cite in APA 7: Meunier, M., Ducharme, M., & Bernier, J.-S. (2003, January). Modeling electrical characteristics of laser tuned silicon microdevices [Paper]. Photon Processing in Microelectronics and Photonics II, San Jose, Calif.. https://doi.org/10.1117/12.479412

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