Laser Induced Local Modification of Silicon Microdevices: a New Technique for Tuning Analogue Microelectronics

Michel Meunier, Mathieu Ducharme, Jean-Yves Degorce, Yougui Liao and Alain Lacourse

Paper (2002)

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Department:	Department of Engineering Physics
ISBN:	0819450170
PolyPublie URL:	https://publications.polymtl.ca/25650/
Conference Title:	International Conference on Advanced Laser Technologies (ALT 2002)
Conference Location:	Adelboden, Switzerland
Conference Date(s):	2002-09-15 - 2002-09-20
Publisher:	Spie-Int Society Optical Engineering
DOI:	10.1117/12.543669
Official URL:	https://doi.org/10.1117/12.543669
Date Deposited:	18 Apr 2023 15:20
Last Modified:	25 Sep 2024 16:05

Cite in APA 7:	Meunier, M., Ducharme, M., Degorce, J.-Y., Liao, Y., & Lacourse, A. (2002, September). Laser Induced Local Modification of Silicon Microdevices: a New Technique for Tuning Analogue Microelectronics [Paper]. International Conference on Advanced Laser Technologies (ALT 2002), Adelboden, Switzerland. https://doi.org/10.1117/12.543669
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