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Laser Induced Local Modification of Silicon Microdevices: a New Technique for Tuning Analogue Microelectronics

Michel Meunier, Mathieu Ducharme, Jean-Yves Degorce, Yougui Liao and Alain Lacourse

Paper (2002)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25650/
Conference Title: International Conference on Advanced Laser Technologies (ALT 2002)
Conference Location: Adelboden, Switzerland
Conference Date(s): 2002-09-15 - 2002-09-20
Publisher: Spie-Int Society Optical Engineering
DOI: 10.1117/12.543669
Official URL: https://doi.org/10.1117/12.543669
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:12
Cite in APA 7: Meunier, M., Ducharme, M., Degorce, J.-Y., Liao, Y., & Lacourse, A. (2002, September). Laser Induced Local Modification of Silicon Microdevices: a New Technique for Tuning Analogue Microelectronics [Paper]. International Conference on Advanced Laser Technologies (ALT 2002), Adelboden, Switzerland. https://doi.org/10.1117/12.543669

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