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Processing of Metals and Semiconductors by a Femtosecond Laser-Based Microfabrication System

Michel Meunier, Bruno Fisette, Alexis Houle, Andrei V. Kabashin, Sergey V. Broude and Pascal Miller

Paper (2003)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25649/
Conference Title: Commercial and Biomedical Applications of Ultrafast Lasers III
Conference Location: San Jose, CA, United States
Conference Date(s): 2003-01-25 - 2003-01-31
Publisher: SPIE - International Society for Optical Engineering
DOI: 10.1117/12.478595
Official URL: https://doi.org/10.1117/12.478595
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:12
Cite in APA 7: Meunier, M., Fisette, B., Houle, A., Kabashin, A. V., Broude, S. V., & Miller, P. (2003, January). Processing of Metals and Semiconductors by a Femtosecond Laser-Based Microfabrication System [Paper]. Commercial and Biomedical Applications of Ultrafast Lasers III, San Jose, CA, United States. https://doi.org/10.1117/12.478595

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