Michel Meunier, Bruno Fisette, Alexis Houle, Andrei V. Kabashin, Sergey V. Broude and Pascal Miller
Paper (2003)
An external link is available for this itemDepartment: | Department of Engineering Physics |
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PolyPublie URL: | https://publications.polymtl.ca/25649/ |
Conference Title: | Commercial and Biomedical Applications of Ultrafast Lasers III |
Conference Location: | San Jose, CA, United States |
Conference Date(s): | 2003-01-25 - 2003-01-31 |
Publisher: | SPIE - International Society for Optical Engineering |
DOI: | 10.1117/12.478595 |
Official URL: | https://doi.org/10.1117/12.478595 |
Date Deposited: | 18 Apr 2023 15:20 |
Last Modified: | 25 Sep 2024 16:05 |
Cite in APA 7: | Meunier, M., Fisette, B., Houle, A., Kabashin, A. V., Broude, S. V., & Miller, P. (2003, January). Processing of Metals and Semiconductors by a Femtosecond Laser-Based Microfabrication System [Paper]. Commercial and Biomedical Applications of Ultrafast Lasers III, San Jose, CA, United States. https://doi.org/10.1117/12.478595 |
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