Effect of steady-state hydrogen coverage on the evolution of crosshatch morphology during Si1-xGex/Si(001) growth from hybride precursors

T. Spila, Patrick Desjardins, J. D'Arcy-Gall, R. D. Twesten and J. E. Greene

Article (2003)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/25475/
Journal Title:	Journal of Applied Physics (vol. 93, no. 4)
Publisher:	American Institute of Physics
DOI:	10.1063/1.1533833
Official URL:	https://doi.org/10.1063/1.1533833
Date Deposited:	18 Apr 2023 15:20
Last Modified:	08 Apr 2025 02:14

Cite in APA 7:	Spila, T., Desjardins, P., D'Arcy-Gall, J., Twesten, R. D., & Greene, J. E. (2003). Effect of steady-state hydrogen coverage on the evolution of crosshatch morphology during Si1-xGex/Si(001) growth from hybride precursors. Journal of Applied Physics, 93(4), 1918-1925. https://doi.org/10.1063/1.1533833
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