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Plasmas and polymers: from APGD to PECVD

Michael R. Wertheimer, G. Dennler and S. Guimond

Paper (2003)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25413/
Conference Title: 16th International Symposium on plasma chemistry (ISPC-16)
Conference Location: Taormina, italy
Conference Date(s): 2003-01-01 - 2003-12-31
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:11
Cite in APA 7: Wertheimer, M. R., Dennler, G., & Guimond, S. (2003, January). Plasmas and polymers: from APGD to PECVD [Paper]. 16th International Symposium on plasma chemistry (ISPC-16), Taormina, italy.

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