Michael R. Wertheimer
, Gilles Dennler and Sébastien Guimond
Paper (2003)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/25413/ |
| Conference Title: | 16th International Symposium on Plasma Chemistry (ISPC 2003) |
| Conference Location: | Taormina, Italy |
| Conference Date(s): | 2003-06-22 - 2003-06-27 |
| Official URL: | https://www.ispc-conference.org/ispcdocs/ispc16/co... |
| Date Deposited: | 18 Apr 2023 15:20 |
| Last Modified: | 24 Jul 2025 13:41 |
| Cite in APA 7: | Wertheimer, M. R., Dennler, G., & Guimond, S. (2003, June). Plasmas and polymers: from APGD to PECVD [Paper]. 16th International Symposium on Plasma Chemistry (ISPC 2003), Taormina, Italy. https://www.ispc-conference.org/ispcdocs/ispc16/complete/ISPC16_600_866.pdf#page=997 |
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