Study of the growth and interface engineering of dense/porous SiNx optical coatings by real-time spectroscopic ellipsometry

Aram Amassian, Richard Vernhes, Jolanta-Ewa Sapieha, Patrick Desjardins and Ludvik Martinu

Paper (2004)

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Additional Information:	MF3
Department:	Department of Engineering Physics
Research Center:	RQMP - Regroupement québécois sur les matériaux de pointe
PolyPublie URL:	https://publications.polymtl.ca/25349/
Conference Title:	Optical Interference Coatings
Conference Location:	Washington, DC, USA
Conference Date(s):	2004-06-27 - 2004-07-02
Publisher:	Optical Society of America
DOI:	10.1364/oic.2004.mf3
Official URL:	https://doi.org/10.1364/oic.2004.mf3
Date Deposited:	18 Apr 2023 15:19
Last Modified:	21 Oct 2024 16:45

Cite in APA 7:	Amassian, A., Vernhes, R., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2004, June). Study of the growth and interface engineering of dense/porous SiNx optical coatings by real-time spectroscopic ellipsometry [Paper]. Optical Interference Coatings, Washington, DC, USA. https://doi.org/10.1364/oic.2004.mf3
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