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Study of the growht and interface engineering of dense/porouss SiN1.3 optical coatings by real-time spectroscopic ellipsometry

A. Amassian, R. Vernhes, Jolanta-Ewa Sapieha, Patrick Desjardins and Ludvik Martinu

Paper (2004)

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Additional Information: MF3
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25349/
Conference Title: Optical Interference Coatings
Conference Location: Washington, DC, USA
Conference Date(s): 2004-01-01 - 2004-12-31
Publisher: Optical Society of America
DOI: 10.1364/oic.2004.mf3
Official URL: https://doi.org/10.1364/oic.2004.mf3
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:11
Cite in APA 7: Amassian, A., Vernhes, R., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2004, January). Study of the growht and interface engineering of dense/porouss SiN1.3 optical coatings by real-time spectroscopic ellipsometry [Paper]. Optical Interference Coatings, Washington, DC, USA. https://doi.org/10.1364/oic.2004.mf3

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