<  Back to the Polytechnique Montréal portal

Interface engineering of porous/dense multilayers of SiN1.3: in situ real-time spectroscopic ellipsometry study

A. Amassian, R. Vernhes, Jolanta-Ewa Sapieha, Patrick Desjardins and Ludvik Martinu

Paper (2004)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25348/
Conference Title: 47th Society of Vacuum Coaters Technical Conference
Conference Date(s): 2004-01-01 - 2004-12-31
Official URL: https://www.svc.org/clientuploads/directory/resour...
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:11
Cite in APA 7: Amassian, A., Vernhes, R., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2004, January). Interface engineering of porous/dense multilayers of SiN1.3: in situ real-time spectroscopic ellipsometry study [Paper]. 47th Society of Vacuum Coaters Technical Conference. https://www.svc.org/clientuploads/directory/resource_library/04_389.pdf

Statistics

Stats are not available on this system.

Repository Staff Only

View Item View Item