A. Amassian, R. Vernhes, Jolanta-Ewa Sapieha
, Patrick Desjardins and Ludvik Martinu
Paper (2004)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/25348/ |
| Conference Title: | 47th Society of Vacuum Coaters Technical Conference |
| Conference Date(s): | 2004-01-01 - 2004-12-31 |
| Official URL: | https://www.svc.org/clientuploads/directory/resour... |
| Date Deposited: | 18 Apr 2023 15:19 |
| Last Modified: | 25 Sep 2024 16:05 |
| Cite in APA 7: | Amassian, A., Vernhes, R., Sapieha, J.-E., Desjardins, P., & Martinu, L. (2004, January). Interface engineering of porous/dense multilayers of SiN1.3: in situ real-time spectroscopic ellipsometry study [Paper]. 47th Society of Vacuum Coaters Technical Conference. https://www.svc.org/clientuploads/directory/resource_library/04_389.pdf |
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