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Organometallic vapor phase epitaxy of GaAs₁₋ₓNₓ alloy layers on GaAs(001): Nitrogen incorporation and lattice parameter variation

J.-N. Beaudry, Rémo A. Masut, Patrick Desjardins, P. Wei, M. Chicoine, G. Bentoumi, R. Leonelli, F. Schiettekatte and S. Guillon

Article (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/25298/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 22, no. 3)
Publisher: American Vacuum Society
DOI: 10.1116/1.1689296
Official URL: https://doi.org/10.1116/1.1689296
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:11
Cite in APA 7: Beaudry, J.-N., Masut, R. A., Desjardins, P., Wei, P., Chicoine, M., Bentoumi, G., Leonelli, R., Schiettekatte, F., & Guillon, S. (2004). Organometallic vapor phase epitaxy of GaAs₁₋ₓNₓ alloy layers on GaAs(001): Nitrogen incorporation and lattice parameter variation. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 22(3), 771-775. https://doi.org/10.1116/1.1689296

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