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Optical characteristics and color of TiN/SiN₁.₃ nanocomposite coatings

P. Jedrzejowski, B. Baloukas, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2004)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/24945/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 22, no. 3)
Publisher: American Vacuum Society
DOI: 10.1116/1.1723252
Official URL: https://doi.org/10.1116/1.1723252
Date Deposited: 18 Apr 2023 15:19
Last Modified: 25 Sep 2024 16:04
Cite in APA 7: Jedrzejowski, P., Baloukas, B., Sapieha, J.-E., & Martinu, L. (2004). Optical characteristics and color of TiN/SiN₁.₃ nanocomposite coatings. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 22(3), 725-733. https://doi.org/10.1116/1.1723252

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