Pawel Michal Jedrzejowski, J. Cizek, Aram Amassian, Jolanta-Ewa Sapieha
, J. Vlček and Ludvik Martinu
Article (2004)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/24944/ |
| Journal Title: | Thin Solid Films (vol. 447-448) |
| Publisher: | Elsevier |
| DOI: | 10.1016/s0040-6090(03)01057-5 |
| Official URL: | https://doi.org/10.1016/s0040-6090%2803%2901057-5 |
| Date Deposited: | 18 Apr 2023 15:19 |
| Last Modified: | 24 Jul 2025 13:33 |
| Cite in APA 7: | Jedrzejowski, P. M., Cizek, J., Amassian, A., Sapieha, J.-E., Vlček, J., & Martinu, L. (2004). Mechanical and optical properties of hard SiCN coatings prepared by PECVD. Thin Solid Films, 447-448, 201-207. https://doi.org/10.1016/s0040-6090%2803%2901057-5 |
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