P. Jedrzejowski, J. Cizek, A. Amassian, Jolanta-Ewa Sapieha, J. Vlcek and Ludvik Martinu
Article (2004)
An external link is available for this itemDepartment: | Department of Engineering Physics |
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Research Center: | GCM - Thin Film Physics and Technology Research Group |
PolyPublie URL: | https://publications.polymtl.ca/24944/ |
Journal Title: | Thin Solid Films (vol. 447-448) |
Publisher: | Elsevier |
DOI: | 10.1016/s0040-6090(03)01057-5 |
Official URL: | https://doi.org/10.1016/s0040-6090%2803%2901057-5 |
Date Deposited: | 18 Apr 2023 15:19 |
Last Modified: | 25 Sep 2024 16:04 |
Cite in APA 7: | Jedrzejowski, P., Cizek, J., Amassian, A., Sapieha, J.-E., Vlcek, J., & Martinu, L. (2004). Mechanical and optical properties of hard SiCN coatings prepared by PECVD. Thin Solid Films, 447-448, 201-207. https://doi.org/10.1016/s0040-6090%2803%2901057-5 |
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