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Mechanical and optical properties of hard SiCN coatings prepared by PECVD

P. Jedrzejowski, J. Cizek, A. Amassian, Jolanta-Ewa Sapieha, J. Vlcek and Ludvik Martinu

Article (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24944/
Journal Title: Thin Solid Films (vol. 447-448)
Publisher: Elsevier
DOI: 10.1016/s0040-6090(03)01057-5
Official URL: https://doi.org/10.1016/s0040-6090%2803%2901057-5
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Jedrzejowski, P., Cizek, J., Amassian, A., Sapieha, J.-E., Vlcek, J., & Martinu, L. (2004). Mechanical and optical properties of hard SiCN coatings prepared by PECVD. Thin Solid Films, 447-448, 201-207. https://doi.org/10.1016/s0040-6090%2803%2901057-5

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