P. Jedrzejowski, Jolanta-Ewa Sapieha
and Ludvik Martinu
Article (2004)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/24942/ |
| Journal Title: | Thin Solid Films (vol. 466, no. 1-2) |
| Publisher: | Elsevier |
| DOI: | 10.1016/j.tsf.2004.03.043 |
| Official URL: | https://doi.org/10.1016/j.tsf.2004.03.043 |
| Date Deposited: | 18 Apr 2023 15:19 |
| Last Modified: | 08 Apr 2025 02:13 |
| Cite in APA 7: | Jedrzejowski, P., Sapieha, J.-E., & Martinu, L. (2004). Quaternary hard nanocomposite TiCₓNy/SiCN coatings prepared by plasma enhanced chemical vapor deposition. Thin Solid Films, 466(1-2), 189-196. https://doi.org/10.1016/j.tsf.2004.03.043 |
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