<  Back to the Polytechnique Montréal portal

Quaternary hard nanocomposite TiCₓNy/SiCN coatings prepared by plasma enhanced chemical vapor deposition

P. Jedrzejowski, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2004)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24942/
Journal Title: Thin Solid Films (vol. 466, no. 1-2)
Publisher: Elsevier
DOI: 10.1016/j.tsf.2004.03.043
Official URL: https://doi.org/10.1016/j.tsf.2004.03.043
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Jedrzejowski, P., Sapieha, J.-E., & Martinu, L. (2004). Quaternary hard nanocomposite TiCₓNy/SiCN coatings prepared by plasma enhanced chemical vapor deposition. Thin Solid Films, 466(1-2), 189-196. https://doi.org/10.1016/j.tsf.2004.03.043

Statistics

Dimensions

Repository Staff Only

View Item View Item