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Laser-assisted methods for nanofabrication

Andrei Kabashin and Michel Meunier

Paper (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24918/
Conference Title: Photon Processing in Microelectronics and Photonics III
Conference Location: San Jose, CA, United States
Conference Date(s): 2004-01-26 - 2004-01-29
Publisher: International Society for Optical Engineering
DOI: 10.1117/12.532281
Official URL: https://doi.org/10.1117/12.532281
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Kabashin, A., & Meunier, M. (2004, January). Laser-assisted methods for nanofabrication [Paper]. Photon Processing in Microelectronics and Photonics III, San Jose, CA, United States. https://doi.org/10.1117/12.532281

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