Andrei Kabashin and Michel Meunier
Paper (2004)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/24918/ |
| Conference Title: | Photon Processing in Microelectronics and Photonics III |
| Conference Location: | San Jose, CA, United States |
| Conference Date(s): | 2004-01-26 - 2004-01-29 |
| Publisher: | International Society for Optical Engineering |
| DOI: | 10.1117/12.532281 |
| Official URL: | https://doi.org/10.1117/12.532281 |
| Date Deposited: | 18 Apr 2023 15:19 |
| Last Modified: | 25 Sep 2024 16:04 |
| Cite in APA 7: | Kabashin, A., & Meunier, M. (2004, January). Laser-assisted methods for nanofabrication [Paper]. Photon Processing in Microelectronics and Photonics III, San Jose, CA, United States. https://doi.org/10.1117/12.532281 |
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