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Single-material inhomogeneous optical filters based on microstructural gradients in plasma-deposited silicon nitride

R. Vernhes, O. Zabeida, Jolanta-Ewa Sapieha and Ludvik Martinu

Article (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24544/
Journal Title: Applied Optics (vol. 43, no. 1)
Publisher: Optical Society of America
DOI: 10.1364/ao.43.000097
Official URL: https://doi.org/10.1364/ao.43.000097
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Vernhes, R., Zabeida, O., Sapieha, J.-E., & Martinu, L. (2004). Single-material inhomogeneous optical filters based on microstructural gradients in plasma-deposited silicon nitride. Applied Optics, 43(1), 97-103. https://doi.org/10.1364/ao.43.000097

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