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Optical Breakdown Processing: Influence of the Ambient Gas on the Properties of the Nanostructured Si-Based Layers Formed

De Quan Yang, Andrei Kabashin, V. G. Pilon-Marien, Edward Sacher and Michel Meunier

Article (2004)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/24515/
Journal Title: Journal of Applied Physics (vol. 95, no. 10)
Publisher: American Institute of Physics
DOI: 10.1063/1.1702102
Official URL: https://doi.org/10.1063/1.1702102
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Yang, D. Q., Kabashin, A., Pilon-Marien, V. G., Sacher, E., & Meunier, M. (2004). Optical Breakdown Processing: Influence of the Ambient Gas on the Properties of the Nanostructured Si-Based Layers Formed. Journal of Applied Physics, 95(10), 5722-5728. https://doi.org/10.1063/1.1702102

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