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Formation of Densely Populated SiOₓ Microtree-Like Structures on the Si (100) Surface, Using Excimer Laser Irradiation in Air

De-Quan Yang, Edward Sacher and Michel Meunier

Paper (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24511/
Conference Title: Photonics North 2004
Conference Location: Ottawa, Ontario, Canada
Conference Date(s): 2004
Publisher: Spie-Int Society Optical Engineering
DOI: 10.1117/12.567860
Official URL: https://doi.org/10.1117/12.567860
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Yang, D.-Q., Sacher, E., & Meunier, M. (2004). Formation of Densely Populated SiOₓ Microtree-Like Structures on the Si (100) Surface, Using Excimer Laser Irradiation in Air [Paper]. Photonics North 2004, Ottawa, Ontario, Canada. https://doi.org/10.1117/12.567860

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