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Adhesion decrease of Au nanoparticles to the O2 plasma-oxidized silicon surface on KrF excimer laser-induced coalescence

D.-Q. Yang, Michel Meunier and Edward Sacher

Paper (2004)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24510/
Conference Title: 27th Annual Meeting of the Adhesion Society
Conference Date(s): 2004-01-01 - 2004-12-31
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Yang, D.-Q., Meunier, M., & Sacher, E. (2004, January). Adhesion decrease of Au nanoparticles to the O2 plasma-oxidized silicon surface on KrF excimer laser-induced coalescence [Paper]. 27th Annual Meeting of the Adhesion Society.

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