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III-V Compliant Substrates Implemented by Nanocavities Introduced by Ion Implantation

M. Chicoine, C. Beaudoin, S. Roorda, Rémo A. Masut and Patrick Desjardins

Article (2005)

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Department: Department of Engineering Physics
Research Center: RQMP - Regroupement québécois sur les matériaux de pointe
PolyPublie URL: https://publications.polymtl.ca/24276/
Journal Title: Journal of Applied Physics (vol. 97, no. 6)
Publisher: American Institute of Physics
DOI: 10.1063/1.1863457
Official URL: https://doi.org/10.1063/1.1863457
Date Deposited: 18 Apr 2023 15:18
Last Modified: 26 Sep 2024 13:11
Cite in APA 7: Chicoine, M., Beaudoin, C., Roorda, S., Masut, R. A., & Desjardins, P. (2005). III-V Compliant Substrates Implemented by Nanocavities Introduced by Ion Implantation. Journal of Applied Physics, 97(6). https://doi.org/10.1063/1.1863457

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