P. Cova, Suzie Poulin, Olivier Grenier and Rémo A. Masut
Article (2005)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/24247/ |
| Journal Title: | Journal of Applied Physics (vol. 97, no. 7) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.1881774 |
| Official URL: | https://doi.org/10.1063/1.1881774 |
| Date Deposited: | 18 Apr 2023 15:18 |
| Last Modified: | 25 Sep 2024 16:04 |
| Cite in APA 7: | Cova, P., Poulin, S., Grenier, O., & Masut, R. A. (2005). A Method for the Analysis of Multiphase Bonding Structures in Amorphous SiOₓ Ny Films. Journal of Applied Physics, 97(7). https://doi.org/10.1063/1.1881774 |
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