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A Method for the Analysis of Multiphase Bonding Structures in Amorphous SiOₓ Ny Films

P. Cova, Suzie Poulin, Olivier Grenier and Rémo A. Masut

Article (2005)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24247/
Journal Title: Journal of Applied Physics (vol. 97, no. 7)
Publisher: American Institute of Physics
DOI: 10.1063/1.1881774
Official URL: https://doi.org/10.1063/1.1881774
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:09
Cite in APA 7: Cova, P., Poulin, S., Grenier, O., & Masut, R. A. (2005). A Method for the Analysis of Multiphase Bonding Structures in Amorphous SiOₓ Ny Films. Journal of Applied Physics, 97(7). https://doi.org/10.1063/1.1881774

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