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Growth study of TiN and superhard nanocompostie c-TiN/Si₃N₄ and c-TiCN/a-SiCN coatings using in situ ellipsometry

P. Jedrzejowski, A. Amassian, E. Bousser, Ludvik Martinu and Jolanta-Ewa Sapieha

Paper (2005)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/24021/
Conference Title: 48th Society of Vacuum Coaters Technical Conference
Conference Location: Denver, Colorado
Conference Date(s): 2005-04-23 - 2005-04-28
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:09
Cite in APA 7: Jedrzejowski, P., Amassian, A., Bousser, E., Martinu, L., & Sapieha, J.-E. (2005, April). Growth study of TiN and superhard nanocompostie c-TiN/Si₃N₄ and c-TiCN/a-SiCN coatings using in situ ellipsometry [Paper]. 48th Society of Vacuum Coaters Technical Conference, Denver, Colorado.

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