P. Jedrzejowski, A. Amassian, E. Bousser, Ludvik Martinu
and Jolanta-Ewa Sapieha
Paper (2005)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/24021/ |
| Conference Title: | 48th Society of Vacuum Coaters Technical Conference |
| Conference Location: | Denver, Colorado |
| Conference Date(s): | 2005-04-23 - 2005-04-28 |
| Date Deposited: | 18 Apr 2023 15:18 |
| Last Modified: | 25 Sep 2024 16:03 |
| Cite in APA 7: | Jedrzejowski, P., Amassian, A., Bousser, E., Martinu, L., & Sapieha, J.-E. (2005, April). Growth study of TiN and superhard nanocompostie c-TiN/Si₃N₄ and c-TiCN/a-SiCN coatings using in situ ellipsometry [Paper]. 48th Society of Vacuum Coaters Technical Conference, Denver, Colorado. |
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