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Deformable MEMS grating for wide tunability

M. Tormen, Yves-Alain Peter, Ph. Niedermann, A. Hoogerwerf and R. Stanley

Paper (2023)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/23617/
Conference Title: International Conference on Optical MEMS and Their Applications
Conference Location: Oulu, Finlande
Conference Date(s): 2023-08-01 - 2023-08-04
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/omems.2005.1540135
Official URL: https://doi.org/10.1109/omems.2005.1540135
Date Deposited: 18 Apr 2023 15:18
Last Modified: 25 Sep 2024 16:03
Cite in APA 7: Tormen, M., Peter, Y.-A., Niedermann, P., Hoogerwerf, A., & Stanley, R. (2023, August). Deformable MEMS grating for wide tunability [Paper]. International Conference on Optical MEMS and Their Applications, Oulu, Finlande. https://doi.org/10.1109/omems.2005.1540135

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