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The Creation of Au Nanoscale Surface Patterns by the Low Energy Ar⁺ Beam Irradiation of Au Clusters Evaporated Onto a SiO₂/Si Surface

D.-Q. Yang, Edward Sacher and Michel Meunier

Article (2005)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/23527/
Journal Title: Applied Physics. A, Materials Science & Processing (vol. 80, no. 3)
Publisher: Springer
DOI: 10.1007/s00339-004-2887-4
Official URL: https://doi.org/10.1007/s00339-004-2887-4
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:08
Cite in APA 7: Yang, D.-Q., Sacher, E., & Meunier, M. (2005). The Creation of Au Nanoscale Surface Patterns by the Low Energy Ar⁺ Beam Irradiation of Au Clusters Evaporated Onto a SiO₂/Si Surface. Applied Physics. A, Materials Science & Processing, 80(3), 575-579. https://doi.org/10.1007/s00339-004-2887-4

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