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Photoacoustic Fourier transform infrared spectroscopy of nanoporous SiOₓ/Si thin films with varying porosities

D.-Q. Yang, Michel Meunier and Edward Sacher

Article (2005)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/23525/
Journal Title: Journal of Applied Physics (vol. 98, no. 11)
Publisher: American Institute of Physics
DOI: 10.1063/1.2138376
Official URL: https://doi.org/10.1063/1.2138376
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:08
Cite in APA 7: Yang, D.-Q., Meunier, M., & Sacher, E. (2005). Photoacoustic Fourier transform infrared spectroscopy of nanoporous SiOₓ/Si thin films with varying porosities. Journal of Applied Physics, 98(11), 114310 (6 pages). https://doi.org/10.1063/1.2138376

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