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Thin film reaction of transition metals with germanium

Simon Gaudet, C. Detavernier, A. J. Kellock, Patrick Desjardins and C. Lavoie

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/23067/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 24, no. 3)
Publisher: American Vacuum Society
DOI: 10.1116/1.2191861
Official URL: https://doi.org/10.1116/1.2191861
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:07
Cite in APA 7: Gaudet, S., Detavernier, C., Kellock, A. J., Desjardins, P., & Lavoie, C. (2006). Thin film reaction of transition metals with germanium. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 24(3), 474-485. https://doi.org/10.1116/1.2191861

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